Fluorine doped tin oxide films from spray pyrolysis of stannous fluoride solutions

• Published in: Applied surface science Vol. 92; no. 1-4; pp. 167 - 170
• Main Authors: Morris, G.C., McElnea, A.E.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01.02.1996; Elsevier Science
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Cross-disciplinary physics: materials science; rheology; Electrical properties of specific thin films; Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures; Exact sciences and technology; Liquid phase epitaxy; deposition from liquid phases (melts, solutions, and surface layers on liquids); Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Other inorganic semiconductors; Physics; Crystal growth; Grain size; Pyrolysis; Inorganic compounds; Fluorine additions; Doped materials; Binary compounds; Experimental study; Fabrication property relation; Spray coating; Film growth; Thin films; Tin oxides; Absorption spectra; Microstructure; Electric conductivity
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/0169-4332(95)00224-3

Transparent conducting films of fluorine doped tin oxide were deposited using spray pyrolysis. The spray solution was tin (II) fluoride in methanol with or without addition of acid. Film thickness, growth rates and polycrystal grain size increased with deposition time, substrate temperature and amount of hydrochloric acid added to the deposition solution. The crystallite orientations in the films depended also on those variables as well as on solution concentration.