Large-Area Low-Cost Flexible Plastic Nanohole Arrays for Integrated Bio-Chemical Sensing

• Published in: IEEE sensors journal Vol. 13; no. 10; pp. 3982 - 3990
• Main Authors: Chuo, Yindar, Hohertz, Donna, Landrock, Clint, Omrane, Badr, Kavanagh, Karen L., Kaminska, Bozena
• Format: Journal Article
• Language: English
• Published: IEEE 01.10.2013
• Subjects: bio-chemical sensor; Fabrication; flexible plastic devices; Integrated sensor; nanohole arrays; plasmonics; Plasmons; Plastics; polymer electronics; Polymers; Sensor arrays; Substrates
• ISSN: 1530-437X; 1558-1748
• DOI: 10.1109/JSEN.2013.2262997

Detection of plasmonic resonance peak shifts of nano-structured metamaterials is a promising method for sensing bio-chemical binding events. Although the concept is widely demonstrated in the laboratory environment using surface nano-structures machined at low-throughput and high-costs, practical solutions for high-volume production of an integrated sensing device are very limited. We present a concept of an integrated architecture that combines a thin layer of plasmonic nanohole sensing arrays, organic light-emitting diode illumination source, and microfluidic chip, for point-of-care, field, or lab applications. We discuss the fabrication of the sensor components. In particular, we present the improved fabrication of master nano-structure replication stamps, and demonstrate outstanding results for producing singular sheets or scale up to roll-to-roll embossing of nanohole arrays on a 2000 ft production roll. We further demonstrate that nanohole arrays embossed on flexible polyethylene terephthalate plastic sheets, when coated with 100 nm thin Au metal film, are capable of generating average plasmonic resonance shifts of 180 nm refractive index unit. Hence, we report the extraordinary transmission and plasmonic resonance shifts of nanohole arrays fabricated on roll-to-roll plastic sheets for the very first time. Our results show that the embossed nano-structures on plastic are suitable as sensor elements in our proposed integrated sensor architecture, and a promising technology for low-cost disposable applications.