Review of carriage feed mechanism with nanometer resolution

A carriage feed is a mechanism composed of a guide and a feed. The four parameters of carriage feed accuracy are: feed reference accuracy, feed resolution, guide reference accuracy and guide component constraint accuracy. Each parameter can be improved through the use of servo techniques. This paper...

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Bibliographic Details
Published inMechanism and machine theory Vol. 31; no. 7; pp. 985 - 998
Main Authors Nomura, Takehiko, Miyashita, Masakazu, Kanai, Akira
Format Journal Article
LanguageEnglish
Published Oxford Elsevier Ltd 01.10.1996
New York, NY Elsevier
Subjects
Applied sciences
Exact sciences and technology
Mechanical engineering. Machine design
Precision engineering, watch making
Guidance
Reviews
Position control
Precision engineering
Feeder
Servomechanisms
Motion control
Nanotechnology
Feeding
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Summary:A carriage feed is a mechanism composed of a guide and a feed. The four parameters of carriage feed accuracy are: feed reference accuracy, feed resolution, guide reference accuracy and guide component constraint accuracy. Each parameter can be improved through the use of servo techniques. This paper discusses, on the basis of kinematic principles, a carriage feed mechanism with no lost motion and a fine feed resolution with high reliability and accuracy in the nanometer range. For nanometer positioning of carriage feed mechanisms, both ball and roller bearing and hydrostatic support mechanisms controlled by force-operated position control can be used. Capacitive transducers and feedback sensors of optical linear scale are also applicable in consideration of S/N ratio.
ISSN:0094-114X
1873-3999
DOI:10.1016/0094-114X(95)00118-I