Comparative Analysis of TEM and Atom Probe Tomography on GeSbTe Compositions in Phase Change Random Access Memory

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

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Bibliographic Details
Published inMicroscopy and microanalysis Vol. 18; no. S2; pp. 1796 - 1797
Main Authors Hwang, K., Bae, J., Park, K., Jeon, S., Ahn, J., Kim, S., Jeong, H., Nam, S., Jeong, G., Jang, D., Park, C.
Format Journal Article
LanguageEnglish
Published New York, USA Cambridge University Press 01.07.2012
Oxford University Press
Subjects
Comparative analysis
Electrodes
Failure Analysis of Structural Materials-04
Physical Science Symposium
Random access memory
Tomography
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Summary:Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
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ObjectType-Conference-3
SourceType-Conference Papers & Proceedings-2
ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927612010835