Selective Chemical Mechanical Polishing Using Surfactants

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 154; no. 7; p. H631
Main Authors Bu, Kyoung-Ho, Moudgil, Brij M.
Format Journal Article
LanguageEnglish
Published 2007
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ISSN:0013-4651
DOI:10.1149/1.2734802