Phosphorus Diffusion in Silicon Using Phosphine

Saved in:
Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 117; no. 6; p. 807
Main Author Hsueh, Y. W.
Format Journal Article
LanguageEnglish
Published 1970
Online AccessGet full text

Cover

Loading…
Author Hsueh, Y. W.
Author_xml – sequence: 1
  givenname: Y. W.
  surname: Hsueh
  fullname: Hsueh, Y. W.
BookMark eNotj01PAjEURbvAREAX_oPZuhh4r32dziwNfmBCogmwntS2T2qwQ1pZ-O_FwOrem5zc5EzEKA0pCHGHMEOkbo4zSWAa1Y7EGABVTY3GazEp5es0sSUzFvP33VAOuyEfS_UYmY8lDqmKqVrHfXSnui0xfVZnKqZwI67Y7ku4veRUbJ6fNotlvXp7eV08rGonG_qpfSCSrI20wF55j84EICstWWaHoI3XCj8866A0t5Ko7dDqlqEDaIKaivvzrctDKTlwf8jx2-bfHqH_l-uxv8ipPxeYRIU
CitedBy_id crossref_primary_10_1116_1_580969
crossref_primary_10_1063_1_329477
crossref_primary_10_1016_j_mseb_2004_07_064
crossref_primary_10_1179_026708408X370203
ContentType Journal Article
DBID AAYXX
CITATION
DOI 10.1149/1.2407638
DatabaseName CrossRef
DatabaseTitle CrossRef
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
Chemistry
ExternalDocumentID 10_1149_1_2407638
GroupedDBID -~X
.-4
.DC
0R~
29L
41~
5GY
6TJ
9M8
AATNI
AAYXX
ABDNZ
ABEFU
ABJNI
ABTAH
ACBEA
ACHIP
ACYGS
ADNWM
AENEX
AI.
AKPSB
ALMA_UNASSIGNED_HOLDINGS
AOAED
CITATION
CJUJL
CS3
DU5
EBS
EJD
F20
F5P
H13
H~9
IOP
JGOPE
KOT
MV1
MVM
N5L
NFQFE
NHB
REC
RHI
RNS
ROL
RPA
TAE
TN5
UPT
VH1
VOH
VQP
WH7
XJT
XOL
YQT
YXB
ZY4
~02
ID FETCH-LOGICAL-c264t-de442f572a0fd3dd1c7e04a2a4affc1057d531bdf5e35f8244891a58f09006e3
ISSN 0013-4651
IngestDate Fri Aug 23 01:47:09 EDT 2024
IsDoiOpenAccess false
IsOpenAccess true
IsPeerReviewed true
IsScholarly true
Issue 6
Language English
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c264t-de442f572a0fd3dd1c7e04a2a4affc1057d531bdf5e35f8244891a58f09006e3
OpenAccessLink https://iopscience.iop.org/article/10.1149/1.2407638/pdf
ParticipantIDs crossref_primary_10_1149_1_2407638
PublicationCentury 1900
PublicationDate 1970-00-00
PublicationDateYYYYMMDD 1970-01-01
PublicationDate_xml – year: 1970
  text: 1970-00-00
PublicationDecade 1970
PublicationTitle Journal of the Electrochemical Society
PublicationYear 1970
SSID ssj0011847
Score 1.2191991
SourceID crossref
SourceType Aggregation Database
StartPage 807
Title Phosphorus Diffusion in Silicon Using Phosphine
Volume 117
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnZ3JS8NAFMYHrQf1IFoVd4J4K9Nmksl2lFIpglqwYj2FmckMLUhaulz8632TSdLUeqheQgjZf-HlzfK-D6E713Ui22MMM6kUpoGgmAviYyWJ4NwLoiSr4n969rtv9HHgDZZi_ll1yZw3xdevdSX_oQrbgKuukv0D2fKksAHWgS8sgTAsN2LcG45nk-F4uphB6FJqMcsnLr6OPgFw2jDzAcxexfj5eiKqU8-OccMRhXxAPpmzhA5wsv6Xj2bjvbnsKSCR8eMo4h5xsXY9X4l7pmgyB1yNYqExol2PrlSLk0KrGlqBvhFlWVWw_vFnKef7mernKCZxfug22nG0Mp-uuHzplcM-0NwMCssJfbu5FBQc2iqvWkkgKplA_xAd5G_Oujc8jtCWTOtot10459XRfkXk8Ri1lpSskpI1Sq2ckpVRskpKJ6j_0Om3uzi3qcACssk5TiSljvICh9kqcZOEiEDalDmMMqWE9lFOINDxRHnS9VQI-VQYEeaFyo4g5En3FNXScSrPkKUoj0QYcO5olwIqme-EiniB0rX-kCueo9vi0eOJESOJ117txSY7XaI9_YWYvqQrVJtPF_Iasqs5v8mIfAP45yST
link.rule.ids 315,783,787,4033,27937,27938,27939
linkProvider IOP Publishing
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Phosphorus+Diffusion+in+Silicon+Using+Phosphine&rft.jtitle=Journal+of+the+Electrochemical+Society&rft.au=Hsueh%2C+Y.+W.&rft.date=1970&rft.issn=0013-4651&rft.volume=117&rft.issue=6&rft.spage=807&rft_id=info:doi/10.1149%2F1.2407638&rft.externalDBID=n%2Fa&rft.externalDocID=10_1149_1_2407638
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0013-4651&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0013-4651&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0013-4651&client=summon