Phosphorus Diffusion in Silicon Using Phosphine
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Published in | Journal of the Electrochemical Society Vol. 117; no. 6; p. 807 |
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Main Author | |
Format | Journal Article |
Language | English |
Published |
1970
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Online Access | Get full text |
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Author | Hsueh, Y. W. |
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Title | Phosphorus Diffusion in Silicon Using Phosphine |
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