Phosphorus Diffusion in Silicon Using Phosphine
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| Published in | Journal of the Electrochemical Society Vol. 117; no. 6; p. 807 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
1970
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| Online Access | Get full text |
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| ISSN: | 0013-4651 |
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| DOI: | 10.1149/1.2407638 |