Characterization of silicon wafers through deposition of self-assembled monolayers
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Published in | Fresenius' journal of analytical chemistry Vol. 368; no. 5; pp. 434 - 438 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
Berlin
Springer
01.11.2000
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Subjects | |
Online Access | Get full text |
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ISSN: | 0937-0633 1432-1130 |
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DOI: | 10.1007/s002160000564 |