Effects of tunable circuit parameters on pulsed discharge and input-output characteristics of a XeCl excimer laser

Abstract High-pressure, pulsed discharge-pumped XeCl excimer lasers are operating in the ultraviolet range at a wavelength of 308 nm. In this paper, a one-dimensional fluid model coupled to a magnetic pulse compression (MPC) excitation circuit and a laser gain model is established for describing the...

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Published inJournal of physics. D, Applied physics Vol. 57; no. 13; pp. 135202 - 135216
Main Authors Chen, Jiayi, Zhao, Zhihang, Liu, Zhigang, Fu, Yangyang
Format Journal Article
LanguageEnglish
Published IOP Publishing 29.03.2024
Subjects
energy efficiency
fluid model
gas discharge
magnetic pulse compression
XeCl excimer laser
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Summary:Abstract High-pressure, pulsed discharge-pumped XeCl excimer lasers are operating in the ultraviolet range at a wavelength of 308 nm. In this paper, a one-dimensional fluid model coupled to a magnetic pulse compression (MPC) excitation circuit and a laser gain model is established for describing the discharge and laser output characteristics of XeCl excimer lasers. The effects of the peaking capacitor C p (the terminal of the MPC circuit) on the discharge properties and input-output characteristics are explored. The results reveal that C p plays a key role in suppressing discharge pulse oscillation, which in turn influences the peak value and duration of the laser pulse. By optimizing the capacitance, a maximum excimer formation efficiency of 6.6% and a maximum laser output efficiency of 5% (output energy of 1.26 J) are obtained when C p = 1.12   C s , where C s is the storage capacitor in the MPC circuit.
Bibliography:JPhysD-135145.R2
ISSN:0022-3727
1361-6463
DOI:10.1088/1361-6463/ad172c