A highly sensitive humidity sensor with a novel hole array structure using a polyimide sensing layer

• Published in: RSC advances Vol. 4; no. 61; pp. 32075 - 32080
• Main Authors: Choi, Kyo Sang, Kim, Deok Su, Yang, Hee Jun, Ryu, Min Soo, Chang, Sung Pil
• Format: Journal Article
• Language: English
• Published: 01.01.2014
• Subjects: Contact; Detection; Electrodes; Humidity; Polyimide resins; Sensor arrays; Sensors; Simulation

If the contact area of water vapor with the sensing part in the humidity sensor is increased, the sensitivity will be increased. In this paper, a new type of capacitive humidity sensor was demonstrated in order to increase the sensitivity of the humidity sensor utilizing MEMS technology. The sensor...