Determination of the electron collision cross sections for the C2H4 molecule by using the electron swarm method

• Published in: Journal of the Korean Physical Society Vol. 64; no. 9; pp. 1314 - 1319
• Main Authors: Hien, Pham Xuan, Jeon, Byung-Hoon
• Format: Journal Article
• Language: English
• Published: Seoul The Korean Physical Society 01.05.2014; 한국물리학회
• Subjects: Mathematical and Computational Physics; Particle and Nuclear Physics; Physics; Physics and Astronomy; Theoretical; 물리학; Electron-collision cross section; 52.25.Fi; Ethylene (C; 52.20.Fs; H; 34.10.+x; Electron swarm study; molecule; Boltzmann equation analysis; Electrontransport coefficient; 34.80.-i
• ISSN: 0374-4884; 1976-8524
• DOI: 10.3938/jkps.64.1314

A set of low-energy electron-collision cross sections for ethene (C 2 H 4 ) is necessary for quantitative numerical modeling of plasma discharges for processing procedures with materials containing C 2 H 4 molecules. The set was derived from the measured electron transport coefficients for a pure C 2 H 4 molecule by using an electron swarm study and a two-term approximation to the Boltzmann equation for energy. The electron transport coefficients, which were calculated by using the derived set, are in good agreement with the experimental values over a wide range of E/N ratios in pure C 2 H 4 molecule, where E is the electric field and N is the neutral number density. The validity of the present set of the C 2 H 4 molecule was not only checked by using a Monte Carlo simulation but also evaluated by comparison with another set.