Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique

The symmetric deposition technique is often used to improve the uniformity of sculptured thin film （STF）. In this paper, optical properties of STF with the columnar angles 4-/3 are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of...

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Published inChinese physics B Vol. 23; no. 11; pp. 556 - 561
Main Author 王斌 齐红基 孙卫 何骏 赵娇玲 王虎 候永强
Format Journal Article
LanguageEnglish
Published 01.11.2014
Subjects
Deposition
Homogeneity
Incidence
Mathematical analysis
Monolayers
Optical properties
Symmetry
Thin films
Variability
光学均匀性
均匀性分析
对称式
掠射角
沉积技术
淀积技术
薄膜
雕塑
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ISSN1674-1056
2058-3834
1741-4199
DOI10.1088/1674-1056/23/11/117801

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Summary:The symmetric deposition technique is often used to improve the uniformity of sculptured thin film （STF）. In this paper, optical properties of STF with the columnar angles 4-/3 are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of uniformity monolayer and bilayer STF in symmetrical style are calculated to show the effect of the bilayer structure on the optical properties of STF. The inhomogeneity of STF is involved in analyzing the differences in transmittance and phase retardation between monolayer and bilayer STF deposited in symmetric style. The results show that optical homogeneity of STF can be improved by depositing in symmetric style at the normal incidence, but it is not the same case as the oblique incidence.
Bibliography:The symmetric deposition technique is often used to improve the uniformity of sculptured thin film （STF）. In this paper, optical properties of STF with the columnar angles 4-/3 are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of uniformity monolayer and bilayer STF in symmetrical style are calculated to show the effect of the bilayer structure on the optical properties of STF. The inhomogeneity of STF is involved in analyzing the differences in transmittance and phase retardation between monolayer and bilayer STF deposited in symmetric style. The results show that optical homogeneity of STF can be improved by depositing in symmetric style at the normal incidence, but it is not the same case as the oblique incidence.
birefringence, dielectric thin films, optical properties
Wang Bin, Qi Hong-Ji, Sun Wei, He Jun, Zhao Jiao-Ling, Wang Hu, and Hou Yong-Qiang（ a） Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences, Shanghai 201800, China b） University of Chinese Academy of Sciences, Beijing 100049, China
11-5639/O4
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1674-1056
2058-3834
1741-4199
DOI:10.1088/1674-1056/23/11/117801