Microelectromechanical capacitor with wide tuning range
A new anchoring design is proposed for a microelectromechanical (MEM) capacitor that allows realisation of wide tuning range devices. The MEM capacitor is made of gold using surface micromachining. The capacitor has a capacitance of 1.58 pF and achieves a tuning range of 2.25:1 with parasitics.
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| Published in | Electronics letters Vol. 37; no. 24; pp. 1451 - 1452 |
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| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
22.11.2001
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| Online Access | Get full text |
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| Summary: | A new anchoring design is proposed for a microelectromechanical (MEM) capacitor that allows realisation of wide tuning range devices. The MEM capacitor is made of gold using surface micromachining. The capacitor has a capacitance of 1.58 pF and achieves a tuning range of 2.25:1 with parasitics. |
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| Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
| ISSN: | 0013-5194 1350-911X |
| DOI: | 10.1049/el:20011005 |