Oxide charge space correlation in inversion layers. II. Three-dimensional oxide charge distribution
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Published in | Semiconductor science and technology Vol. 10; no. 5; pp. 592 - 600 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
01.05.1995
Institute of Physics |
Subjects | |
Online Access | Get full text |
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ISSN: | 0268-1242 1361-6641 |
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DOI: | 10.1088/0268-1242/10/5/004 |