Acoustic characterization of AlN films using a High Overtone Bulk acoustic wave resonator

Using the composite resonator with additional thick AlN film with the FWHM of rocking curve of 2.53° under investigation, the bulk acoustic wave attenuation constant and sound velocity along c-axis were directly measured. The method of High Overtone Bulk acoustic wave Resonator (HBAR) spectroscopy b...

Full description

Saved in:
Bibliographic Details
Published inIntegrated ferroelectrics Vol. 41; no. 1-4; pp. 155 - 166
Main Authors Lee, Si-Hyung, Kim, Ju-Hyung, Lee, Jeon-Kook, Mansfeld, G. D., Alekseev, S. G., Yoon, Ki Hyun
Format Journal Article
LanguageEnglish
Published Taylor & Francis Group 01.01.2001
Subjects
A1N
attenuation
HBAR
rocking curve
sound velocity
Online AccessGet full text

Cover

More Information
Summary:Using the composite resonator with additional thick AlN film with the FWHM of rocking curve of 2.53° under investigation, the bulk acoustic wave attenuation constant and sound velocity along c-axis were directly measured. The method of High Overtone Bulk acoustic wave Resonator (HBAR) spectroscopy based on frequency, measurements of the positions of the resonator peculiarities of phase and amplitude of electromagnetic wave reflection coefficient from composite resonator structure was applied. The method provides attenuation and velocity measurement in a wide frequency band, using the same sample. For the measurements, standard and modified HBAR spectroscopy based on the analysis of only parallel resonance properties of composite resonator structures were used.
ISSN:1058-4587
1607-8489
DOI:10.1080/10584580108012818