Emission spectroscopy combined with a single and a double probe in low-pressure inductively-coupled nitrogen-argon plasmas

• Published in: Journal of the Korean Physical Society Vol. 61; no. 3; pp. 376 - 386
• Main Authors: Park, Jae Min, Song, Min A., Chung, T. H.
• Format: Journal Article
• Language: English
• Published: Seoul The Korean Physical Society 01.08.2012; 한국물리학회
• Subjects: Mathematical and Computational Physics; Particle and Nuclear Physics; Physics; Physics and Astronomy; Research Papers; Theoretical; 물리학; Inductively coupled nitrogen-Ar plasma; Langmuir probe; Optical emission
• ISSN: 0374-4884; 1976-8524
• DOI: 10.3938/jkps.61.376

Low-pressure inductively coupled N 2 -Ar plasmas have been studied to investigate the effects of operating parameters, including the Ar content, applied power, and gas pressure. By means of optical emission spectroscopy and single and double Langmuir probe diagnostic techniques, the evolutions of the plasma density, the electron temperature, and the N 2 + , N 2 , N, and Ar emission lines have been investigated with a discussion of a spatially-averaged global model. From the emission spectra, the ratios of the concentrations of species of interest, and the rotational and the vibrational temperatures of the nitrogen molecules are obtained for various discharge conditions. The rotational and the vibrational temperatures of N 2 are found to increase with increasing applied power, pressure, and Ar content, thus making nitrogen plasmas more reactive.