Physical origin investigation of the flatband voltage roll off for metal-oxide-semiconductor device with high-k/metal gate structure

The physical origin of the flatband voltage （VFB） roll off for a metal-oxide-semiconductor device with high-k/metal gate structure is studied from the viewpoint of energy band alignment at the high-k/Si interface because the thickness of SiO2 interlayer is thin enough to be ignored. The VFB roll off...

Full description

Saved in:
Bibliographic Details
Published inJournal of semiconductors Vol. 36; no. 9; pp. 71 - 74
Main Author 韩锴 王晓磊 王文武
Format Journal Article
LanguageEnglish
Published 01.09.2015
Subjects
Devices
Electric potential
Energy bands
Gates
Origins
Rolls
Semiconductors
SiO2层
Voltage
半导体器件
平带电压
栅结构
物理
电子传递
起源
金属氧化物
Online AccessGet full text

Cover

More Information
Summary:The physical origin of the flatband voltage （VFB） roll off for a metal-oxide-semiconductor device with high-k/metal gate structure is studied from the viewpoint of energy band alignment at the high-k/Si interface because the thickness of SiO2 interlayer is thin enough to be ignored. The VFB roll off phenomenon is assigned to associate with the direct electron transfer between high-k and Si substrate. Quantitatively calculated simulation results based on this model are given considering different conditions.
Bibliography:high-k dielectric; band alignment; VFB roll off
11-5781/TN
The physical origin of the flatband voltage （VFB） roll off for a metal-oxide-semiconductor device with high-k/metal gate structure is studied from the viewpoint of energy band alignment at the high-k/Si interface because the thickness of SiO2 interlayer is thin enough to be ignored. The VFB roll off phenomenon is assigned to associate with the direct electron transfer between high-k and Si substrate. Quantitatively calculated simulation results based on this model are given considering different conditions.
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1674-4926
DOI:10.1088/1674-4926/36/9/094006