Cleaning of carbon-contaminated optics using O2/Ar plasma

Cleaning of carbon-contaminated beamline optics was studied by RF plasma discharge process using O2/Ar. Carbon-coated samples were prepared, and through their cleaning processes key parameters were determined, such as the optimal RF output power, mixing rates of O2/ Ar, and chamber vacuum. Considera...

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Bibliographic Details
Published inNuclear science and techniques Vol. 28; no. 9; pp. 16 - 20
Main Authors Zhang, Yi-Fei, Luo, Hong-Xin, Guo, Zhi, Zhen, Xiang-Jun, Chen, Ming, Liu, Jun-Nan
Format Journal Article
LanguageEnglish
Published Singapore Springer Singapore 01.09.2017
Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201204, China
Subjects
Energy
Hadrons
Heavy Ions
Nuclear Energy
Nuclear Physics
光学参数
光束线
动力学效应
射频等离子体
氧
碳污染
等离子体清洗
表面粗糙度
Beamline photon flux
Cable’s conductivity
RF plasma cleaning
Carbon-coated samples
Roughness
Cable's conductivity
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Summary:Cleaning of carbon-contaminated beamline optics was studied by RF plasma discharge process using O2/Ar. Carbon-coated samples were prepared, and through their cleaning processes key parameters were determined, such as the optimal RF output power, mixing rates of O2/ Ar, and chamber vacuum. Considerations were made against possible adverse effects in cleaning the beamline optics, such as comparing the roughness of samples before and after cleaning, and possible detrimental kinetic effects on cable insulation. Under the cleaning parameters to clean the beamline optics, the thickness of removed carbon film and the change in beamline photon flux were analyzed.
Bibliography:Cleaning of carbon-contaminated beamline optics was studied by RF plasma discharge process using O2/Ar. Carbon-coated samples were prepared, and through their cleaning processes key parameters were determined, such as the optimal RF output power, mixing rates of O2/ Ar, and chamber vacuum. Considerations were made against possible adverse effects in cleaning the beamline optics, such as comparing the roughness of samples before and after cleaning, and possible detrimental kinetic effects on cable insulation. Under the cleaning parameters to clean the beamline optics, the thickness of removed carbon film and the change in beamline photon flux were analyzed.
31-1559/TL
RF plasma cleaning ; Carbon-coated samples ;Roughness ; Cable＇s conductivity ; Beamline photon flux
ISSN:1001-8042
2210-3147
DOI:10.1007/s41365-017-0274-z