Impurity Distribution in Epitaxial Silicon Films

Saved in:
Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 109; no. 11; p. 1055
Main Authors Thomas, C. O., Kahng, D., Manz, R. C.
Format Journal Article
LanguageEnglish
Published 1962
Online AccessGet full text

Cover

Be the first to leave a comment!
You must be logged in first