Impurity Distribution in Epitaxial Silicon Films

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 109; no. 11; p. 1055
Main Authors Thomas, C. O., Kahng, D., Manz, R. C.
Format Journal Article
LanguageEnglish
Published 1962
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ISSN:0013-4651
DOI:10.1149/1.2425235