Quantification of Defect Dynamics in Unsteady-State and Steady-State Czochralski Growth of Monocrystalline Silicon [J. Electrochem. Soc., 151, G663 (2004)]

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 152; no. 1; p. L2
Main Authors Kulkarni, Milind S., Voronkov, Vladimir, Falster, Robert
Format Journal Article
LanguageEnglish
Published 2005
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ISSN:0013-4651
DOI:10.1149/1.1839580