Excitation of Surface Acoustic Waves Using Electron Acoustic Microscope

A focused, modulated electron beam can generate acoustic bulk waves and surface acoustic waves (SAW) at the surface of a front specimen. By conventional electron acoustic microscope the acoustic bulk waves are detected by a piezoelectric transducer at the rear surface. In this paper, acoustic surfac...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 23; no. S1; p. 191
Main Authors Yamanouchi, Kazuhiko, Kudo, Satoshi, Wagatsuma, Yasuo
Format Journal Article
LanguageEnglish
Published 01.01.1984
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Summary:A focused, modulated electron beam can generate acoustic bulk waves and surface acoustic waves (SAW) at the surface of a front specimen. By conventional electron acoustic microscope the acoustic bulk waves are detected by a piezoelectric transducer at the rear surface. In this paper, acoustic surface waves which are effectively excited by electron beams are detected at the surface of the specimen. This technique gives better imaging than the bulk wave detection.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAPS.23S1.191