Double junction photodiode for X-ray CMOS sensor IC

• Published in: Journal of semiconductors Vol. 35; no. 7; pp. 84 - 89
• Main Author: 许超群 孙颖 韩雁 朱大中
• Format: Journal Article
• Language: English
• Published: 01.07.2014
• Subjects: CMOS; CMOS传感器; CMOS兼容; CsI（Tl）; Fluorescence; Integrated circuits; Photodiodes; Pixels; Semiconductors; Sensors; X-rays; X射线光子; 像素阵列; 光电二极管; 荧光光谱
• ISSN: 1674-4926
• DOI: 10.1088/1674-4926/35/7/074011

A CMOS compatible P＋/Nwell/Psub double junction photodiode pixel was proposed, which can effi- ciently detect fluorescence from CsI（T1） scintillation in an X-ray sensor. Photoelectric and spectral responses of P＋/Nwell, NweE1/Psub and P＋/Nwell/Psub photodiodes were analyzed and modeled. Simulation results show P＋/Nweu/Psub photodiode has larger photocurrent than P＋/Nwetl photodiode and Nweu/Psub photodiode, and its spectral response is more in accordance with CsI（T1） fluorescence spectrum. Improved P＋/Nweu/Psub photodiode detecting CsI（T1） fluorescence was designed in CSMC 0.5 #m CMOS process, CTIA （capacitive transimpedance amplifier） architecture was used to readout photocurrent signal. CMOS X-ray sensor IC prototype contains 8 × 8 pixel array and pixel pitch is 100 × 100 μm2. Testing results show the dark current of the improved P＋/Nwell/Psub photodiode （6.5 pA） is less than that of P＋/Nwell and P＋/Nwell/Psub photodiodes （13 pA and 11 pA respectively）. The sen- sitivity of P＋/Nwell/Psub photodiode is about 20 pA/lux under white LED. The spectrum response of P＋/Nwell/Psub photodiode ranges from 400 nm to 800 nm with a peak at 532 nm, which is in accordance with the fluorescence spectrum of Csl（T1） in an indirect X-ray sensor. Preliminary testing results show the sensitivity of X-ray sensor IC under Cu target X-ray is about 0.21 V.m^2/W or 5097e-/pixel @ 8.05 keV considering the pixel size, integration time and average energy of X-ray photons.