Surface measurements by white light spatial-phase-shift imaging interferometry

A novel method of common-path imaging interferometry, the White Light Spatial-Phase-Shift (WLSPS) for object surface measurements, is discussed here. Compared to standard White Light Interferometry (WLI), which uses a reference mirror, the interferometry of WLSPS is obtained by creating manipulation...

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Bibliographic Details
Published inOptics express Vol. 22; no. 13; pp. 15632 - 15638
Main Authors Arieli, Yoel, Epshtein, Shlomi, Yakubov, Igor, Weitzman, Yosi, Locketz, Garrett, Harris, Alon
Format Journal Article
LanguageEnglish
Published United States 30.06.2014
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Summary:A novel method of common-path imaging interferometry, the White Light Spatial-Phase-Shift (WLSPS) for object surface measurements, is discussed here. Compared to standard White Light Interferometry (WLI), which uses a reference mirror, the interferometry of WLSPS is obtained by creating manipulations to the light wavefront reflected from an object's surface. Using this approach, surface measurements can be obtained from any real object image, and do not need to be taken directly from the object itself. This creates the ability for a surface measurement tool to be attached to any optical system that generates a real image of an object. Further, as this method does not require a reference beam, the surface measurement system contains inherent vibration cancelation.
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ISSN:1094-4087
1094-4087
DOI:10.1364/OE.22.015632