Preparation of SnO2 film on porous diatomite-based substrate by AACVD for high-performance H2 sensing

• Published in: Ceramics international Vol. 51; no. 14; pp. 18563 - 18572
• Main Authors: Zhao, Sikai, Shi, Jianing, Yan, Chenghao, Ding, Xudong, Wang, Wenxin, Liu, Wenbao, Shen, Yanbai, Zhao, Qiang
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.06.2025
• Subjects: AACVD; Gas sensing; SnO2; SnO2; Gas sensing; H2; AACVD; Film
• ISSN: 0272-8842
• DOI: 10.1016/j.ceramint.2025.02.036

With the increasing importance of hydrogen in energy transition, industrial process, environmental sustainability, etc., there is a growing demand for highly sensitive and reliable hydrogen sensors. SnO2 is one of the typical and most promising materials for high-performance hydrogen sensors fabrication. The present SnO2 gas sensing films are typically prepared by using evaporation or sputtering techniques, which require expensive equipment or high temperature, resulting in elevated production cost. Here, we designed a high-efficiency and low-cost aerosol-assisted chemical vapor deposition process to prepare SnO2 film on the diatomite-based substrate for high-performance hydrogen sensing. The structural details were comprehensively investigated by using the combination techniques of diffraction, spectroscopy, and microscopy. While the gas sensing properties were studied on a gas sensing system that equipped with probes and heater. A comparison of the microstructure and hydrogen sensing performance of the SnO2 film grown on substrates with varying surface characteristics were conducted. Gas sensing tests demonstrated excellent hydrogen sensing performance at a relatively low operating temperature of 150 °C, offering a promising solution for hydrogen detection.