Atomic layer deposition of TiO2−xNx thin films for photocatalytic applications
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Published in | Journal of photochemistry and photobiology. A, Chemistry. Vol. 177; no. 1; pp. 68 - 75 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
01.01.2006
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Online Access | Get full text |
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ISSN: | 1010-6030 |
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DOI: | 10.1016/j.jphotochem.2005.05.013 |