Modelling of multilayer films using spectroscopic ellipsometry

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Bibliographic Details
Published inJournal of materials science Vol. 30; no. 16; pp. 4014 - 4018
Main Authors CHATTOPADHYAY, K, AUBEL, J, SUNDARAM, S
Format Journal Article
LanguageEnglish
Published Heidelberg Springer 15.08.1995
Subjects
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Exact sciences and technology
Iii-v semiconductors
Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of bulk materials and thin films
Optical properties of specific thin films
Physics
Gallium arsenides
Inorganic compounds
Semiconductor materials
Ternary compounds
Refractive index
Binary compounds
Experimental study
Indium arsenides
Ellipsometry
Extinction index
Multilayers
Permittivity
Heterostructures
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ISSN:0022-2461
1573-4803
DOI:10.1007/BF00360702