High-Performance Solid-Phase Crystallized Polycrystalline Silicon Thin-Film Transistors with Floating-Channel Structure

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 47; no. 4S; p. 3024
Main Authors Chang, Chia-Wen, Deng, Chih-Kang, Chang, Che-Lun, Liao, Ta-Chuan, Lei, Tan-Fu
Format Journal Article
LanguageEnglish
Published 01.04.2008
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.47.3024