Investigation of the surface topography for the characterization of microstructures of amorphous SiNx-coatings

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Bibliographic Details
Published inFresenius' Journal of Analytical Chemistry Vol. 353; no. 3-4; pp. 364 - 368
Main Authors Zahn, W., Wuttke, W., Z sch, A.
Format Journal Article
LanguageEnglish
Published 01.01.1995
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ISSN:0937-0633
1618-2650
DOI:10.1007/BF00322070