Wet-etching fabrication of multilayer GaAlAs/GaAs microtips for scanning near-field optical microscopy

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Bibliographic Details
Published inApplied physics. A, Materials science & processing Vol. 71; no. 2; pp. 223 - 225
Main Authors KHALFALLAH, S, GORECKI, C, PODLECKI, J, NISHIOKA, M, KAWAKATSU, H, ARAKAWA, Y
Format Journal Article
LanguageEnglish
Published Berlin Springer 01.08.2000
Subjects
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Near-field scanning optical microscopes
Physics
Scanning probe microscopes, components and techniques
Aluminium arsenides
Fabrication
Multilayers
Gallium arsenides
Manufacturing processes
Microscope tips
Ternary compounds
Binary compounds
Etching
Experimental study
Scanning near field optical microscopy
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ISSN:0947-8396
1432-0630
DOI:10.1007/PL00021124