Micropatterning of Indium Tin Oxide Thin Films by Selective Deposition and Improvement in Selectivity by Combination with Substrate Vibration

Saved in:
Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 46; no. 5R; p. 3016
Main Authors Takakuwa, Atsushi, Mitani, Tadaoki, Shimoda, Tatsuya
Format Journal Article
LanguageEnglish
Published 01.05.2007
Online AccessGet full text

Cover

More Information
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.46.3016