Tantalum thin-film superconducting transition edge thermometers

Sputter deposited Ta thin films make excellent superconducting transition edge temperature sensors. Depending on film thickness, their transition temperature, T sub(c), ranges from 4.4K to as least as low as 0.5K. A figure of merit of 50K super(-1) is easily achieved. The films are mechanically extr...

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Bibliographic Details
Published inJournal of low temperature physics Vol. 121; no. 5-6; pp. 821 - 824
Main Authors MOHAZZAB, Masoud, MULDERS, Norbert, NASH, Al, LARSON, Melora
Format Conference Proceeding Journal Article
LanguageEnglish
Published Heidelberg Springer 01.12.2000
Subjects
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Thermal instruments, apparatus and techniques
Thermometry
Thin films
Superconducting films
Tantalum
Thermometers
Magnetic field effects
Aging
Heat treatments
Figure of merit
Superconducting transition
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Summary:Sputter deposited Ta thin films make excellent superconducting transition edge temperature sensors. Depending on film thickness, their transition temperature, T sub(c), ranges from 4.4K to as least as low as 0.5K. A figure of merit of 50K super(-1) is easily achieved. The films are mechanically extremely strong, and at room temperature show minimal aging. Using a simple heat treatment technique, T sub(c) can be tuned to the desired operating range.
Bibliography:SourceType-Scholarly Journals-2
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ISSN:0022-2291
1573-7357
DOI:10.1023/a:1017589611451