Effects of He-ion bombardment on the ferroelectric and dielectric properties of BaHf0.17Ti0.83O3 films
Focused helium ion bombardment provides an effective means to modify the properties of ferroelectric materials. This work systematically investigates the effect of helium ion bombardment on the structural, ferroelectric, and dielectric properties of relaxor BaHf0.17Ti0.83O3 thin films at different b...
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| Published in | Applied physics letters Vol. 121; no. 7 |
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| Main Authors | , , , , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
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American Institute of Physics
15.08.2022
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| Abstract | Focused helium ion bombardment provides an effective means to modify the properties of ferroelectric materials. This work systematically investigates the effect of helium ion bombardment on the structural, ferroelectric, and dielectric properties of relaxor BaHf0.17Ti0.83O3 thin films at different bombardment doses in the range of 1 × 1012 to 7 × 1015 ions/cm2. The films show more defects and slightly expanded out-of-plane lattice parameters with an increase in dose. Despite helium ion bombardment introducing more defects and structural disorder in the system, the bombardment-induced dipole polarization leads to enhanced ferroelectricity. Our findings highlight energetic helium ion bombardment as an effective way to enhance the ferroelectricity of relaxor materials. |
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| AbstractList | Focused helium ion bombardment provides an effective means to modify the properties of ferroelectric materials. This work systematically investigates the effect of helium ion bombardment on the structural, ferroelectric, and dielectric properties of relaxor BaHf0.17Ti0.83O3 thin films at different bombardment doses in the range of 1 × 1012 to 7 × 1015 ions/cm2. The films show more defects and slightly expanded out-of-plane lattice parameters with an increase in dose. Despite helium ion bombardment introducing more defects and structural disorder in the system, the bombardment-induced dipole polarization leads to enhanced ferroelectricity. Our findings highlight energetic helium ion bombardment as an effective way to enhance the ferroelectricity of relaxor materials. |
| Author | Liu, Tongyu Zhao, Wanli Lu, Lu Liu, Ming Ma, Chunrui Lu, Rui Liu, Linyue Fan, Jiangqi Hu, Guangliang |
| Author_xml | – sequence: 1 givenname: Rui surname: Lu fullname: Lu, Rui organization: School of Microelectronics, Xi'an Jiaotong University – sequence: 2 givenname: Guangliang surname: Hu fullname: Hu, Guangliang organization: School of Microelectronics, Xi'an Jiaotong University – sequence: 3 givenname: Wanli surname: Zhao fullname: Zhao, Wanli organization: Science and Technology on Electro-Optical Information Security Control Laboratory – sequence: 4 givenname: Tongyu surname: Liu fullname: Liu, Tongyu organization: Science and Technology on Electro-Optical Information Security Control Laboratory – sequence: 5 givenname: Jiangqi surname: Fan fullname: Fan, Jiangqi organization: State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University – sequence: 6 givenname: Chunrui surname: Ma fullname: Ma, Chunrui organization: State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University – sequence: 7 givenname: Lu surname: Lu fullname: Lu, Lu organization: 4State Key Laboratory of Intense Pulsed Radiation Simulation and Effect, Northwest Institute of Nuclear Technology, Xi'an 710024, China – sequence: 8 givenname: Linyue surname: Liu fullname: Liu, Linyue organization: State Key Laboratory of Intense Pulsed Radiation Simulation and Effect, Northwest Institute of Nuclear Technology – sequence: 9 givenname: Ming surname: Liu fullname: Liu, Ming organization: 4State Key Laboratory of Intense Pulsed Radiation Simulation and Effect, Northwest Institute of Nuclear Technology, Xi'an 710024, China |
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| Cites_doi | 10.1002/admi.201700991 10.1016/j.vacuum.2018.06.064 10.1109/TED.2021.3104532 10.1088/0022-3727/47/4/045310 10.1126/science.abb0631 10.1016/S0168-583X(03)01731-2 10.1007/s10854-019-02724-9 10.1080/00150198208260644 10.1063/1.5125809 10.1016/j.nanoen.2018.12.056 10.1063/1.1868887 10.1063/1.5036941 10.1126/science.aaw8109 10.1016/j.cap.2016.01.009 10.1063/1.4898196 10.1103/PhysRevLett.114.256801 10.1002/adma.201603968 10.1063/1.1862336 10.1103/PhysRevMaterials.2.084414 10.1143/JJAP.46.L471 10.1126/science.abk3195 10.1080/10420150.2017.1286660 10.1016/j.nimb.2010.12.066 10.1080/10420150.2012.706611 10.1063/5.0044987 10.1016/j.tsf.2014.04.038 10.1209/0295-5075/92/36005 10.1063/1.4805045 10.1103/PhysRevLett.123.207602 10.1016/j.nimb.2007.01.165 10.1021/acsaelm.0c01071 10.1016/S0022-3093(00)00278-7 |
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| SubjectTerms | Applied physics Defects Dielectric properties Dielectric relaxation Dipoles Ferroelectric materials Ferroelectricity Helium ions Ion bombardment Lattice parameters Relaxors Thin films |
| Title | Effects of He-ion bombardment on the ferroelectric and dielectric properties of BaHf0.17Ti0.83O3 films |
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