Effects of He-ion bombardment on the ferroelectric and dielectric properties of BaHf0.17Ti0.83O3 films

Focused helium ion bombardment provides an effective means to modify the properties of ferroelectric materials. This work systematically investigates the effect of helium ion bombardment on the structural, ferroelectric, and dielectric properties of relaxor BaHf0.17Ti0.83O3 thin films at different b...

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Bibliographic Details
Published inApplied physics letters Vol. 121; no. 7
Main Authors Lu, Rui, Hu, Guangliang, Zhao, Wanli, Liu, Tongyu, Fan, Jiangqi, Ma, Chunrui, Lu, Lu, Liu, Linyue, Liu, Ming
Format Journal Article
LanguageEnglish
Published Melville American Institute of Physics 15.08.2022
Subjects
Applied physics
Defects
Dielectric properties
Dielectric relaxation
Dipoles
Ferroelectric materials
Ferroelectricity
Helium ions
Ion bombardment
Lattice parameters
Relaxors
Thin films
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Summary:Focused helium ion bombardment provides an effective means to modify the properties of ferroelectric materials. This work systematically investigates the effect of helium ion bombardment on the structural, ferroelectric, and dielectric properties of relaxor BaHf0.17Ti0.83O3 thin films at different bombardment doses in the range of 1 × 1012 to 7 × 1015 ions/cm2. The films show more defects and slightly expanded out-of-plane lattice parameters with an increase in dose. Despite helium ion bombardment introducing more defects and structural disorder in the system, the bombardment-induced dipole polarization leads to enhanced ferroelectricity. Our findings highlight energetic helium ion bombardment as an effective way to enhance the ferroelectricity of relaxor materials.
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content type line 14
ISSN:0003-6951
1077-3118
DOI:10.1063/5.0107438