The chemistry of the semiconductor industry
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Published in | Chemical Society reviews Vol. 25; no. 6; p. 393 |
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Main Author | |
Format | Journal Article |
Language | English |
Published |
1996
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Online Access | Get full text |
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ISSN: | 0306-0012 1460-4744 |
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DOI: | 10.1039/cs9962500393 |