Nanofabrication and characterization using a scanning tunneling microscope

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Bibliographic Details
Published inNanotechnology Vol. 4; no. 4; pp. 194 - 199
Main Authors Dagata, J A, Tseng, W, Schneir, J, Silver, R M
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.10.1993
Institute of Physics
Subjects
Electron, positron and ion microscopes, electron diffractometers and related techniques
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Scanning probe microscopes, components, and techniques
Characterization
Fabrication
Surfaces
Scanning tunneling microscopy
Semiconductor materials
Passivation
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ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/4/4/003