Influence of Working Pressure on Ion Sensitive Probe Measurement in Microwave ECR Plasmas

In order to precisely measure the ion parameters in a microwave electron cyclotron resonance plasma using an ion sensitive probe,the dependences of the current-voltage（I-V）characteristics on the shielding height（h）and the potential difference between inner and outer electrodes（V_B）have been investig...

Full description

Saved in:
Bibliographic Details
Published inPlasma science & technology Vol. 17; no. 4; pp. 294 - 297
Main Author 马志斌 吴俊 谭必松 沈武林 潘鑫 汪建华
Format Journal Article
LanguageEnglish
Published 01.04.2015
Subjects
Drift
ECR
Electric potential
Electrodes
Electron cyclotron resonance
Microwaves
Plasmas
Shielding
Voltage
微波
探针
灵敏
电子回旋共振等离子体
离子敏感
等离子体压力
精确测量
Online AccessGet full text
ISSN1009-0630
DOI10.1088/1009-0630/17/4/06

Cover

More Information
Summary:In order to precisely measure the ion parameters in a microwave electron cyclotron resonance plasma using an ion sensitive probe,the dependences of the current-voltage（I-V）characteristics on the shielding height（h）and the potential difference between inner and outer electrodes（V_B）have been investigated at different working pressures of 0.03 Pa and 0.8 Pa.Results show that the I-V curves at higher pressure are more sensitive to the variation of h than those at lower pressure.The influence of V_B on ion temperature（T_i）measurement becomes more prominent when the pressure is increased from 0.03 Pa to 0.8 Pa.Under both pressures,the optimized h is obtained at the condition where the current reaches zero in the positive voltage region with a suitable V_B of-1.5 V because of effective shielding of the electron E×B drift.
Bibliography:working pressure ion sensitive probe ion temperature plasma
34-1187/TL
In order to precisely measure the ion parameters in a microwave electron cyclotron resonance plasma using an ion sensitive probe,the dependences of the current-voltage（I-V）characteristics on the shielding height（h）and the potential difference between inner and outer electrodes（V_B）have been investigated at different working pressures of 0.03 Pa and 0.8 Pa.Results show that the I-V curves at higher pressure are more sensitive to the variation of h than those at lower pressure.The influence of V_B on ion temperature（T_i）measurement becomes more prominent when the pressure is increased from 0.03 Pa to 0.8 Pa.Under both pressures,the optimized h is obtained at the condition where the current reaches zero in the positive voltage region with a suitable V_B of-1.5 V because of effective shielding of the electron E×B drift.
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1009-0630
DOI:10.1088/1009-0630/17/4/06