Piezoresistivity of silicon-on-insulator films by zone-melting recrystallization
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Published in | Journal of micromechanics and microengineering Vol. 3; no. 2; pp. 96 - 101 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
01.06.1993
Institute of Physics |
Subjects | |
Online Access | Get full text |
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ISSN: | 0960-1317 1361-6439 |
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DOI: | 10.1088/0960-1317/3/2/011 |