Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing

• Published in: Light: advanced manufacturing Vol. 4; no. 4; pp. 1 - 569
• Main Authors: Huang, Long, Hong, Zhihan, Chen, Qi-Dai, Zhang, Yong-Lai, Zhao, Shaoqing, Dong, Yongjun, Liu, Yu-Qing, Liu, Hua
• Format: Journal Article
• Language: English
• Published: Light Publishing Group 2023
• Subjects: 3d printing; femtosecond laser direct writing; micro/nano fabrication; microoptical elements
• ISSN: 2831-4093; 2689-9620
• DOI: 10.37188/lam.2023.037

The development of modern information technology has led to significant demand for microoptical elements with complex surface profiles and nanoscale surface roughness. Therefore, various micro- and nanoprocessing techniques are used to fabricate microoptical elements and systems. Femtosecond laser direct writing (FsLDW) uses ultrafast pulses and the ultraintense instantaneous energy of a femtosecond laser for micro-nano fabrication. FsLDW exhibits various excellent properties, including nonlinear multiphoton absorption, high-precision processing beyond the diffraction limit, and the universality of processable materials, demonstrating its unique advantages and potential applications in three-dimensional (3D) micro-nano manufacturing. FsLDW has demonstrated its value in the fabrication of various microoptical systems. This study details three typical principles of FsLDW, several design considerations to improve processing performance, processable materials, imaging/nonimaging microoptical elements, and their stereoscopic systems. Finally, a summary and perspective on the future research directions for FsLDW-enabled microoptical elements and stereoscopic systems are provided.