Comparison of compound layer nucleation mechanisms in plasma nitriding and nitrocarburizing : the effect of CHn species

This article presents a new study of the mechanisms of plasma nitriding and nitrocarburizing processes, with particular emphasis on plasma diagnostics and light element detection at the treated sample surface. The results indicate that in the nitriding process neutrals, such as Fe, N and ions (such...

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Bibliographic Details
Published inJournal of materials science Vol. 34; no. 5; pp. 1045 - 1049
Main Authors SHI LI, MANORY, R. R
Format Journal Article
LanguageEnglish
Published Heidelberg Springer 01.03.1999
Springer Nature B.V
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Summary:This article presents a new study of the mechanisms of plasma nitriding and nitrocarburizing processes, with particular emphasis on plasma diagnostics and light element detection at the treated sample surface. The results indicate that in the nitriding process neutrals, such as Fe, N and ions (such as N+), are abundantly present near the cathode region, suggesting that the formation of iron nitrides occurs through the combination of these species. Light element detection by elastic recoil analysis (ERA) shows that hydrogen is not present on the nitrided surface, but it is abundant on the nitrocarburized surface. The latter result is discussed in view of existing nitriding models. The role of CHn radicals in plasma nitrocarburizing is also discussed.
ISSN:0022-2461
1573-4803
DOI:10.1023/A:1004548112547