A Planar Architecture with Dual-Nonlinearity for Bandwidth Extension of a Multi-Modal Energy Harvester

• Published in: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) pp. 271 - 274
• Main Authors: Wang, Kai, Shao, Xiufeng, Dai, Xuhan, Yang, Zhuoqing, Ding, Guifu, Zhao, Xiaolin
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01.01.2020
• Subjects: Dual-nonlinearity; MEMS; Multi-modal; Planar architecture; Vibration energy harvester
• ISSN: 2160-1968
• DOI: 10.1109/MEMS46641.2020.9056429

A novel planar architecture with dual-nonlinearity mechanism is proposed for broadening bandwidth of a two-degree-of-freedom (2DOF) MEMS energy harvester. Two micro springs with different inherent nonlinearity are incorporated into the inner and outer oscillation stage of a 2DOF planar spring-mass resonator, helping to generate double hardening nonlinear responses with increased bandwidth, and for the first time, overcoming the deep valley separating neighboring resonances in multi-modal system. This characteristic leads to an ultra-wide operation bandwidth covering two adjacent nonlinear responses. Test results show that at the acceleration of 1g, a continuous energy spectrum with half power bandwidth over 100Hz and high normalized power density of 952\ \mu \mathrm{Wcm}^{-3}\mathrm{g}^{-2} are achieved.