Crystal-orientation dependent etch rates and a trench model for dry etching
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Published in | Journal of the Electrochemical Society Vol. 135; no. 6; pp. 1521 - 1525 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Pennington, NJ
Electrochemical Society
01.06.1988
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Subjects | |
Online Access | Get full text |
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ISSN: | 0013-4651 1945-7111 |
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DOI: | 10.1149/1.2096045 |