The future of two-dimensional semiconductors beyond Moore’s law

The primary challenge facing silicon-based electronics, crucial for modern technological progress, is difficulty in dimensional scaling. This stems from a severe deterioration of transistor performance due to carrier scattering when silicon thickness is reduced below a few nanometres. Atomically thi...

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Published inNature nanotechnology Vol. 19; no. 7; pp. 895 - 906
Main Authors Kim, Ki Seok, Kwon, Junyoung, Ryu, Huije, Kim, Changhyun, Kim, Hyunseok, Lee, Eun-Kyu, Lee, Doyoon, Seo, Seunghwan, Han, Ne Myo, Suh, Jun Min, Kim, Jekyung, Song, Min-Kyu, Lee, Sangho, Seol, Minsu, Kim, Jeehwan
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LanguageEnglish
Published London Nature Publishing Group UK 01.07.2024
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Abstract The primary challenge facing silicon-based electronics, crucial for modern technological progress, is difficulty in dimensional scaling. This stems from a severe deterioration of transistor performance due to carrier scattering when silicon thickness is reduced below a few nanometres. Atomically thin two-dimensional (2D) semiconductors still maintain their electrical characteristics even at sub-nanometre scales and offer the potential for monolithic three-dimensional (3D) integration. Here we explore a strategic shift aimed at addressing the scaling bottleneck of silicon by adopting 2D semiconductors as new channel materials. Examining both academic and industrial viewpoints, we delve into the latest trends in channel materials, the integration of metal contacts and gate dielectrics, and offer insights into the emerging landscape of industrializing 2D semiconductor-based transistors for monolithic 3D integration. This Review explores adopting 2D semiconductors to overcome the scaling bottleneck of Si-based electronics. Recent trends and potential approaches for the development of 2D materials as a channel are discussed. Following this, the prerequisites, obstacles and feasible technologies for integrating contacts and gate dielectrics with 2D semiconductor-based channels are examined. The Review also provides an industrial perspective towards facilitating monolithic 3D integration.
AbstractList The primary challenge facing silicon-based electronics, crucial for modern technological progress, is difficulty in dimensional scaling. This stems from a severe deterioration of transistor performance due to carrier scattering when silicon thickness is reduced below a few nanometres. Atomically thin two-dimensional (2D) semiconductors still maintain their electrical characteristics even at sub-nanometre scales and offer the potential for monolithic three-dimensional (3D) integration. Here we explore a strategic shift aimed at addressing the scaling bottleneck of silicon by adopting 2D semiconductors as new channel materials. Examining both academic and industrial viewpoints, we delve into the latest trends in channel materials, the integration of metal contacts and gate dielectrics, and offer insights into the emerging landscape of industrializing 2D semiconductor-based transistors for monolithic 3D integration.The primary challenge facing silicon-based electronics, crucial for modern technological progress, is difficulty in dimensional scaling. This stems from a severe deterioration of transistor performance due to carrier scattering when silicon thickness is reduced below a few nanometres. Atomically thin two-dimensional (2D) semiconductors still maintain their electrical characteristics even at sub-nanometre scales and offer the potential for monolithic three-dimensional (3D) integration. Here we explore a strategic shift aimed at addressing the scaling bottleneck of silicon by adopting 2D semiconductors as new channel materials. Examining both academic and industrial viewpoints, we delve into the latest trends in channel materials, the integration of metal contacts and gate dielectrics, and offer insights into the emerging landscape of industrializing 2D semiconductor-based transistors for monolithic 3D integration.
The primary challenge facing silicon-based electronics, crucial for modern technological progress, is difficulty in dimensional scaling. This stems from a severe deterioration of transistor performance due to carrier scattering when silicon thickness is reduced below a few nanometres. Atomically thin two-dimensional (2D) semiconductors still maintain their electrical characteristics even at sub-nanometre scales and offer the potential for monolithic three-dimensional (3D) integration. Here we explore a strategic shift aimed at addressing the scaling bottleneck of silicon by adopting 2D semiconductors as new channel materials. Examining both academic and industrial viewpoints, we delve into the latest trends in channel materials, the integration of metal contacts and gate dielectrics, and offer insights into the emerging landscape of industrializing 2D semiconductor-based transistors for monolithic 3D integration. This Review explores adopting 2D semiconductors to overcome the scaling bottleneck of Si-based electronics. Recent trends and potential approaches for the development of 2D materials as a channel are discussed. Following this, the prerequisites, obstacles and feasible technologies for integrating contacts and gate dielectrics with 2D semiconductor-based channels are examined. The Review also provides an industrial perspective towards facilitating monolithic 3D integration.
The primary challenge facing silicon-based electronics, crucial for modern technological progress, is difficulty in dimensional scaling. This stems from a severe deterioration of transistor performance due to carrier scattering when silicon thickness is reduced below a few nanometres. Atomically thin two-dimensional (2D) semiconductors still maintain their electrical characteristics even at sub-nanometre scales and offer the potential for monolithic three-dimensional (3D) integration. Here we explore a strategic shift aimed at addressing the scaling bottleneck of silicon by adopting 2D semiconductors as new channel materials. Examining both academic and industrial viewpoints, we delve into the latest trends in channel materials, the integration of metal contacts and gate dielectrics, and offer insights into the emerging landscape of industrializing 2D semiconductor-based transistors for monolithic 3D integration.
The primary challenge facing silicon-based electronics, crucial for modern technological progress, is difficulty in dimensional scaling. This stems from a severe deterioration of transistor performance due to carrier scattering when silicon thickness is reduced below a few nanometres. Atomically thin two-dimensional (2D) semiconductors still maintain their electrical characteristics even at sub-nanometre scales and offer the potential for monolithic three-dimensional (3D) integration. Here we explore a strategic shift aimed at addressing the scaling bottleneck of silicon by adopting 2D semiconductors as new channel materials. Examining both academic and industrial viewpoints, we delve into the latest trends in channel materials, the integration of metal contacts and gate dielectrics, and offer insights into the emerging landscape of industrializing 2D semiconductor-based transistors for monolithic 3D integration.This Review explores adopting 2D semiconductors to overcome the scaling bottleneck of Si-based electronics. Recent trends and potential approaches for the development of 2D materials as a channel are discussed. Following this, the prerequisites, obstacles and feasible technologies for integrating contacts and gate dielectrics with 2D semiconductor-based channels are examined. The Review also provides an industrial perspective towards facilitating monolithic 3D integration.
Author Han, Ne Myo
Kim, Hyunseok
Lee, Sangho
Kwon, Junyoung
Seo, Seunghwan
Lee, Eun-Kyu
Kim, Jekyung
Kim, Jeehwan
Song, Min-Kyu
Kim, Changhyun
Suh, Jun Min
Ryu, Huije
Seol, Minsu
Lee, Doyoon
Kim, Ki Seok
Author_xml – sequence: 1
  givenname: Ki Seok
  orcidid: 0000-0002-7958-4058
  surname: Kim
  fullname: Kim, Ki Seok
  organization: Department of Mechanical Engineering, Massachusetts Institute of Technology, Research Laboratory of Electronics, Massachusetts Institute of Technology
– sequence: 2
  givenname: Junyoung
  orcidid: 0000-0002-5351-342X
  surname: Kwon
  fullname: Kwon, Junyoung
  organization: Samsung Advanced Institute of Technology, Samsung Electronics Co. Ltd
– sequence: 3
  givenname: Huije
  surname: Ryu
  fullname: Ryu, Huije
  organization: Samsung Advanced Institute of Technology, Samsung Electronics Co. Ltd
– sequence: 4
  givenname: Changhyun
  orcidid: 0000-0002-0989-1482
  surname: Kim
  fullname: Kim, Changhyun
  organization: Samsung Advanced Institute of Technology, Samsung Electronics Co. Ltd
– sequence: 5
  givenname: Hyunseok
  orcidid: 0000-0003-3091-8413
  surname: Kim
  fullname: Kim, Hyunseok
  organization: Department of Mechanical Engineering, Massachusetts Institute of Technology, Department of Electrical and Computer Engineering, University of Illinois Urbana-Champaign
– sequence: 6
  givenname: Eun-Kyu
  orcidid: 0000-0003-3056-3827
  surname: Lee
  fullname: Lee, Eun-Kyu
  organization: Samsung Advanced Institute of Technology, Samsung Electronics Co. Ltd
– sequence: 7
  givenname: Doyoon
  orcidid: 0000-0003-4355-8146
  surname: Lee
  fullname: Lee, Doyoon
  organization: Research Laboratory of Electronics, Massachusetts Institute of Technology, Department of Materials Science and Engineering, Massachusetts Institute of Technology
– sequence: 8
  givenname: Seunghwan
  surname: Seo
  fullname: Seo, Seunghwan
  organization: Department of Mechanical Engineering, Massachusetts Institute of Technology, Research Laboratory of Electronics, Massachusetts Institute of Technology
– sequence: 9
  givenname: Ne Myo
  orcidid: 0000-0001-9389-7141
  surname: Han
  fullname: Han, Ne Myo
  organization: Department of Mechanical Engineering, Massachusetts Institute of Technology, Research Laboratory of Electronics, Massachusetts Institute of Technology
– sequence: 10
  givenname: Jun Min
  orcidid: 0000-0001-8506-0739
  surname: Suh
  fullname: Suh, Jun Min
  organization: Department of Mechanical Engineering, Massachusetts Institute of Technology, Research Laboratory of Electronics, Massachusetts Institute of Technology
– sequence: 11
  givenname: Jekyung
  orcidid: 0000-0002-8250-5736
  surname: Kim
  fullname: Kim, Jekyung
  organization: Department of Mechanical Engineering, Massachusetts Institute of Technology, Research Laboratory of Electronics, Massachusetts Institute of Technology
– sequence: 12
  givenname: Min-Kyu
  orcidid: 0000-0002-9233-9356
  surname: Song
  fullname: Song, Min-Kyu
  organization: Department of Mechanical Engineering, Massachusetts Institute of Technology, Research Laboratory of Electronics, Massachusetts Institute of Technology
– sequence: 13
  givenname: Sangho
  orcidid: 0000-0003-4164-1827
  surname: Lee
  fullname: Lee, Sangho
  organization: Department of Mechanical Engineering, Massachusetts Institute of Technology, Research Laboratory of Electronics, Massachusetts Institute of Technology
– sequence: 14
  givenname: Minsu
  orcidid: 0000-0002-8920-6181
  surname: Seol
  fullname: Seol, Minsu
  email: minsu.seol@samsung.com
  organization: Samsung Advanced Institute of Technology, Samsung Electronics Co. Ltd
– sequence: 15
  givenname: Jeehwan
  orcidid: 0000-0002-1547-0967
  surname: Kim
  fullname: Kim, Jeehwan
  email: jeehwan@mit.edu
  organization: Department of Mechanical Engineering, Massachusetts Institute of Technology, Research Laboratory of Electronics, Massachusetts Institute of Technology, Samsung Advanced Institute of Technology, Samsung Electronics Co. Ltd, Department of Materials Science and Engineering, Massachusetts Institute of Technology
BackLink https://www.ncbi.nlm.nih.gov/pubmed/38951597$$D View this record in MEDLINE/PubMed
BookMark eNp9kLtOwzAUhi1URGnhBRhQJBaWgG_HTkaEuElFLGW2nMSGVElc7ESoG6_B6_EkuLSAxMBkW_7-_-h8EzTqXGcQOiL4jGCWnQdOQECKKU8xETmkZAftE8mzlLEcRj_3TI7RJIQFxkBzyvfQmGU5EMjlPrqYP5vEDv3gTeJs0r-6tKpb04XadbpJgmnr0nXVUPbOh6Qwq_hI7p3z5uPtPSSNfj1Au1Y3wRxuzyl6vL6aX96ms4ebu8uLWVpSEH2aWWBSciaoBUugAFbgyoAUVSkg5wXFWjDLM9CFpRgk07gsdM5zrSlIbNkUnW56l969DCb0qq1DaZpGd8YNQTEsuaRRQxbRkz_owg0-7rOmMpBcCAKRohuq9C4Eb6xa-rrVfqUIVmvBaiNYRcHqS7AiMXS8rR6K1lQ_kW-jEWAbIMSv7sn439n_1H4CQWWHgQ
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ContentType Journal Article
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DBID NPM
AAYXX
CITATION
7QO
7U5
8FD
F28
FR3
K9.
L7M
P64
7X8
DOI 10.1038/s41565-024-01695-1
DatabaseName PubMed
CrossRef
Biotechnology Research Abstracts
Solid State and Superconductivity Abstracts
Technology Research Database
ANTE: Abstracts in New Technology & Engineering
Engineering Research Database
ProQuest Health & Medical Complete (Alumni)
Advanced Technologies Database with Aerospace
Biotechnology and BioEngineering Abstracts
MEDLINE - Academic
DatabaseTitle PubMed
CrossRef
Biotechnology Research Abstracts
Technology Research Database
ProQuest Health & Medical Complete (Alumni)
Solid State and Superconductivity Abstracts
Engineering Research Database
Advanced Technologies Database with Aerospace
ANTE: Abstracts in New Technology & Engineering
Biotechnology and BioEngineering Abstracts
MEDLINE - Academic
DatabaseTitleList MEDLINE - Academic

PubMed
Biotechnology Research Abstracts
Database_xml – sequence: 1
  dbid: NPM
  name: PubMed
  url: https://proxy.k.utb.cz/login?url=http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed
  sourceTypes: Index Database
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EISSN 1748-3395
EndPage 906
ExternalDocumentID 10_1038_s41565_024_01695_1
38951597
Genre Journal Article
Review
GrantInformation_xml – fundername: United States Department of Defense | United States Air Force | AFMC | Air Force Office of Scientific Research (AF Office of Scientific Research)
  grantid: FA9550-22-1-0024
  funderid: https://doi.org/10.13039/100000181
– fundername: United States Department of Defense | Defense Advanced Research Projects Agency (DARPA)
  grantid: D19AP00037-07
  funderid: https://doi.org/10.13039/100000185
– fundername: United States Department of Defense | Defense Advanced Research Projects Agency (DARPA)
  grantid: D19AP00037-07
– fundername: United States Department of Defense | United States Air Force | AFMC | Air Force Office of Scientific Research (AF Office of Scientific Research)
  grantid: FA9550-22-1-0024
GroupedDBID ---
-~X
0R~
123
29M
39C
3V.
4.4
53G
5BI
5M7
5S5
6OB
70F
7X7
88E
8FE
8FG
8FH
8FI
8FJ
8R4
8R5
AAEEF
AARCD
AAZLF
ABAWZ
ABDBF
ABJCF
ABJNI
ABLJU
ABUWG
ABVXF
ACGFS
ACIWK
ACPRK
ADBBV
AENEX
AFBBN
AFKRA
AFLOW
AFRAH
AFSHS
AFWHJ
AGAYW
AGEZK
AGHTU
AHBCP
AHMBA
AHOSX
AHSBF
AIBTJ
ALFFA
ALIPV
ALMA_UNASSIGNED_HOLDINGS
ARAPS
ARMCB
ASPBG
AVWKF
AXYYD
AZFZN
BBNVY
BENPR
BGLVJ
BHPHI
BKKNO
BPHCQ
BVXVI
CCPQU
CS3
D1I
DB5
DU5
EBS
EE.
EJD
EMOBN
ESX
EXGXG
F5P
FEDTE
FQGFK
FSGXE
FYUFA
HCIFZ
HMCUK
HVGLF
HZ~
I-F
KB.
L6V
LK8
M1P
M7P
M7S
MM.
NNMJJ
O9-
ODYON
P2P
P62
PDBOC
PQQKQ
PROAC
PSQYO
PTHSS
Q2X
RNS
RNT
RNTTT
SHXYY
SIXXV
SNYQT
SV3
TAOOD
TBHMF
TDRGL
TSG
TUS
UKHRP
~8M
AAYZH
NPM
AAYXX
CITATION
7QO
7U5
8FD
F28
FR3
K9.
L7M
P64
7X8
AAEXX
ABEEJ
ADZGE
ID FETCH-LOGICAL-c256t-8f53774362f5f15b53b0de576dc6594b20a63f485abf20573a0cba949aa2570f3
ISSN 1748-3387
1748-3395
IngestDate Sat Aug 17 04:21:57 EDT 2024
Thu Oct 10 21:04:32 EDT 2024
Thu Sep 12 20:45:05 EDT 2024
Wed Oct 23 10:03:02 EDT 2024
Fri Oct 11 20:44:42 EDT 2024
IsPeerReviewed true
IsScholarly true
Issue 7
Language English
License 2024. Springer Nature Limited.
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c256t-8f53774362f5f15b53b0de576dc6594b20a63f485abf20573a0cba949aa2570f3
Notes ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
ObjectType-Review-3
content type line 23
ORCID 0000-0002-5351-342X
0000-0003-3091-8413
0000-0003-3056-3827
0000-0002-9233-9356
0000-0002-0989-1482
0000-0002-7958-4058
0000-0001-8506-0739
0000-0002-1547-0967
0000-0003-4355-8146
0000-0002-8250-5736
0000-0001-9389-7141
0000-0003-4164-1827
0000-0002-8920-6181
PMID 38951597
PQID 3085746615
PQPubID 546299
PageCount 12
ParticipantIDs proquest_miscellaneous_3074726958
proquest_journals_3085746615
crossref_primary_10_1038_s41565_024_01695_1
pubmed_primary_38951597
springer_journals_10_1038_s41565_024_01695_1
PublicationCentury 2000
PublicationDate 2024-07-01
PublicationDateYYYYMMDD 2024-07-01
PublicationDate_xml – month: 07
  year: 2024
  text: 2024-07-01
  day: 01
PublicationDecade 2020
PublicationPlace London
PublicationPlace_xml – name: London
– name: England
PublicationTitle Nature nanotechnology
PublicationTitleAbbrev Nat. Nanotechnol
PublicationTitleAlternate Nat Nanotechnol
PublicationYear 2024
Publisher Nature Publishing Group UK
Nature Publishing Group
Publisher_xml – name: Nature Publishing Group UK
– name: Nature Publishing Group
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SSID ssj0052924
Score 2.5219014
SecondaryResourceType review_article
Snippet The primary challenge facing silicon-based electronics, crucial for modern technological progress, is difficulty in dimensional scaling. This stems from a...
SourceID proquest
crossref
pubmed
springer
SourceType Aggregation Database
Index Database
Publisher
StartPage 895
SubjectTerms 639/301/1005/1007
639/925/927/1007
Chemistry and Materials Science
Dielectrics
Electric contacts
Electronics
Electronics industry
Integration
Low dimensional semiconductors
Materials Science
Nanotechnology
Nanotechnology and Microengineering
Review Article
Scaling
Semiconductors
Silicon
Thickness
Transistors
Trends
Two dimensional materials
Title The future of two-dimensional semiconductors beyond Moore’s law
URI https://link.springer.com/article/10.1038/s41565-024-01695-1
https://www.ncbi.nlm.nih.gov/pubmed/38951597
https://www.proquest.com/docview/3085746615
https://www.proquest.com/docview/3074726958/abstract/
Volume 19
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnR3LbtNAcBWlFzgg3gQKMhI3s5Dsw_YeU0RVETWnRurN2t14RRGyK2yrChf4DX6PL2H2YcdNqES5WNZ6NGvvjOexOw-E3jglJukMa54pzJQkWOiCY6JTXShhaCpscvLpMjlZsU_n_Hw0-jGIWmob9U5__2teyf9QFcaArjZL9haU7ZHCANwDfeEKFIbrP9PYFwVxR_1XFV7bYv2-0EZc27j3qrQFXW1HHeVzVU4rG1kbQhxEHX8Nu9jBQF26Qp9xKcuq2dt1D62XFxcgYqo-xWdxVYUEj3JjZUd_hrNpnWJrL74UOxhcTsPnTVsONx0I6wNUm65mt32X3Z2yeLUYiNKUZRgcYK9Oi-GYb6vZy18x4LN0IEyzAOf1snCVCfZFvi_wXltH1Oaa25iaRHA82yq4PuzQHbjTLPfAOQDnDjgH9_mApILzMTqYHx8dLTtlzonwfZG7jwl5V4Dl_f6U122bPYdl77Dd2TBn99G94HxEc89JD9CoKB-iu4OSlI_QHHgq8jwVVSba4anoOk9Fnqcix1O_f_6qI-Cmx2h1_PHswwkObTawBnu3wZnhFJwAsGQMNzOuOFXTdQF-6FonXDBFpjKhhmVcKkNs_Uw51UoKJqS0LRANfYLGZVUWz1BEZJJKnspEC8W4yTJqCNOGGkrWgC2boLhboPzSV1PJbybKBB12a5iHv67OqW3JwMCq5BP0un8MMtEedMmyqFoLA04yARww4VO_9v10YKBbEz6doLcdMbbIb36X57cDf4HubH-bQzRuvrXFS7BeG_UqcNgfazqUng
link.rule.ids 315,786,790,27955,27956
linkProvider Library Specific Holdings
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=The+future+of+two-dimensional+semiconductors+beyond+Moore%E2%80%99s+law&rft.jtitle=Nature+nanotechnology&rft.au=Kim%2C+Ki+Seok&rft.au=Kwon%2C+Junyoung&rft.au=Ryu%2C+Huije&rft.au=Kim%2C+Changhyun&rft.date=2024-07-01&rft.pub=Nature+Publishing+Group+UK&rft.issn=1748-3387&rft.eissn=1748-3395&rft.volume=19&rft.issue=7&rft.spage=895&rft.epage=906&rft_id=info:doi/10.1038%2Fs41565-024-01695-1&rft.externalDocID=10_1038_s41565_024_01695_1
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1748-3387&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1748-3387&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1748-3387&client=summon