A one-step shallow trench global planarization process using chemical mechanical polishing
Saved in:
Published in | Journal of the Electrochemical Society Vol. 144; no. 5; pp. 1838 - 1841 |
---|---|
Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Pennington, NJ
Electrochemical Society
01.05.1997
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
ISSN: | 0013-4651 1945-7111 |
---|---|
DOI: | 10.1149/1.1837687 |