Effect of chlorine species on diamond deposition from plasma jets with chlorobenzenes as carbon sources

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 145; no. 8; pp. 2895 - 2900
Main Authors ITOH, K.-I, HORII, N, MATSUMOTO, O
Format Journal Article
LanguageEnglish
Published Pennington, NJ Electrochemical Society 01.08.1998
Subjects
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Growth from vapor
Materials science
Methods of crystal growth; physics of crystal growth
Physics
Optical spectrometry
Emission spectroscopy
Diamonds
Crystal growth from vapors
Surface analysis
Experimental study
Precursor
Plasma jets
Adsorption
Chlorine Organic compounds
Nonmetals
Benzenic compound
Plasma deposition
Organic compounds
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.1838732