Effects of a Ni alloying element on Al-Ni metallization

The effect of the Ni content (2-18 at.% Ni) in Al thin films on their resistivity, hillock formation and Al3Ni compound formation was investigated. The as-deposited Al-Ni-alloy films showed high elastic strains which increased with increasing Ni content. In addition, the annealing of the supersatura...

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Published inSemiconductor science and technology Vol. 27; no. 1; pp. 15021 - 15026
Main Authors Lee, K W, Han, D M, Jeong, K H, Lee, K B, Lee, J G, Jeong, C O, Bae, Y H, Ruh, H, Kim, C S, Lee, E G
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 11.01.2012
Institute of Physics
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