Use of the temperature dependence of the therma-wave technique as a thermometer

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 99; no. 1; pp. 583 - 586
• Main Authors: Rathmell, Robert D., Kamenitsa, Dennis, Brubaker, Steve, Reece, Ron, Pearce, N.O.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.05.1995

The therma-wave technique is widely used to monitor dose uniformity and repeatability in ion implantation. It is also known that the therma-wave signal and related parameters can be affected by the wafer temperature during implant and by the temperatures the wafer experiences after implantation. We...