C-axis Oriented AlN Thin Films on Silicon Prepared by Ultrahigh Vacuum Evaporation of Al Combined with Post-Nitridation

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Bibliographic Details
Published inChinese physics letters Vol. 15; no. 10; pp. 732 - 733
Main Authors Huang, Ji-po, Wang, Lian-wei, Shen, Qin-wo, Gao, Jian-xia, Ni, Ru-shan, Lin, Cheng-lu
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.10.1998
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ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/15/10/012