New design of operational MEMS bridges for measurements of properties of FEBID-based nanostructures

• Published in: Beilstein journal of nanotechnology Vol. 15; no. 1; pp. 1273 - 1282
• Main Authors: Pruchnik, Bartosz, Kwoka, Krzysztof, Gacka, Ewelina, Badura, Dominik, Kunicki, Piotr, Sierakowski, Andrzej, Janus, Paweł, Piasecki, Tomasz, Gotszalk, Teodor
• Format: Journal Article
• Language: English
• Published: Germany Beilstein-Institut 23.10.2024
• Subjects: febid; Full Research Paper; mems; mems bridge; Nanoscience; Nanotechnology; nanowires; opmems; MEMS; FEBID; nanowires; MEMS bridge; opMEMS
• ISSN: 2190-4286; 2190-4286
• DOI: 10.3762/bjnano.15.103

Focused electron beam-induced deposition (FEBID) is a novel technique for the development of multimaterial nanostructures. More importantly, it is applicable to the fabrication of free-standing nanostructures. Experimenting at the nanoscale requires instruments with sufficient resolution and sensitivity to measure various properties of nanostructures. Such measurements (regardless of the nature of the quantities being measured) are particularly problematic in the case of free-standing nanostructures, whose properties must be separated from the measurement system to avoid possible interference. In this paper, we propose novel devices, namely operational micro-electromechanical system (opMEMS) bridges. These are 3D substrates with nanometer-scale actuation capability and equipped with electrical contacts characterised by leakage resistances above 100 GΩ, which provide a platform for comprehensive measurements of properties (i.e., resistance) of free-standing FEBID structures. We also present a use case scenario in which an opMEMS bridge is used to measure the resistance of a free-standing FEBID nanostructure.