The effects of substrates on carbon nitride thin films prepared by direct dual ion beam deposition

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Bibliographic Details
Published inThin solid films Vol. 355-356; pp. 239 - 245
Main Authors Lee, Deuk Yeon, Kim, Yong Hwan, Kim, In Kyo, Baik, Hong Koo
Format Journal Article
LanguageEnglish
Published 01.11.1999
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ISSN:0040-6090
DOI:10.1016/S0040-6090(99)00556-8